Processing and on-wafer measurements of ferroelectric interdigitated tunable microwave capacitors

Alexander M. Grishin^*, Jang Yong Kim, Sergey I. Khartsev

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	307-312
Number of pages	6
Journal	Materials Research Society Symposium Proceedings
Volume	811
DOIs	https://doi.org/10.1557/proc-811-d10.1
Publication status	Published - 2004
Externally published	Yes
Event	Integration of Advanced Micro- and Nanoelectronic Devices - Critical Issues and Solutions - San Francisco, CA, United States Duration: 13 Apr 2004 → 16 Apr 2004

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@article{61cf86a8d59d459a80f035312c7ebf10,

title = "Processing and on-wafer measurements of ferroelectric interdigitated tunable microwave capacitors",

author = "Grishin, \{Alexander M.\} and Kim, \{Jang Yong\} and Khartsev, \{Sergey I.\}",

year = "2004",

doi = "10.1557/proc-811-d10.1",

language = "English",

volume = "811",

pages = "307--312",

journal = "Materials Research Society Symposium Proceedings",

issn = "0272-9172",

note = "Integration of Advanced Micro- and Nanoelectronic Devices - Critical Issues and Solutions ; Conference date: 13-04-2004 Through 16-04-2004",

}

TY - JOUR

T1 - Processing and on-wafer measurements of ferroelectric interdigitated tunable microwave capacitors

AU - Grishin, Alexander M.

AU - Kim, Jang Yong

AU - Khartsev, Sergey I.

PY - 2004

Y1 - 2004

UR - https://www.scopus.com/pages/publications/12744258069

U2 - 10.1557/proc-811-d10.1

DO - 10.1557/proc-811-d10.1

M3 - Conference article

AN - SCOPUS:12744258069

SN - 0272-9172

VL - 811

SP - 307

EP - 312

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

T2 - Integration of Advanced Micro- and Nanoelectronic Devices - Critical Issues and Solutions

Y2 - 13 April 2004 through 16 April 2004

ER -