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Phase-shift control in two-beam laser interference lithography
Jia Xu*, Wei Zhang, Lanjiao Liu, Zuobin Wang, Jin Zhang, Zhengxun Song, Zhankun Weng, Zhen Hu, Yong Yue, Dayou Li
*Corresponding author for this work
Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review