Monolithic Investigation of Hydrogen Plasma-Treated and Etched p-GaN Gate HEMTs Under OFF-State Drain Stress

Fan Li, Ye Liang, Yuanlei Zhang, Yixiao Huang, Ang Li, Yuhao Zhu, Chenruiyuan Yu, Yubo Wang, Shiqiang Wu, Guohao Yu, Yi Pei, Baoshun Zhang, Wen Liu

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