Abstract
Nanocomposite amorphous carbon films were prepared by the filtered cathodic vacuum arc (FCVA) technique. Incorporating up to 10 at.% of a metal element into a graphitic target resulted in the presence of a carbide phase in a-C:Si and a-C:Ti films but not in a-C:Al films. Incorporating metal into amorphous carbon films significantly reduced compressive stress but maintained the relatively high hardness and Young's modulus.
| Original language | English |
|---|---|
| Pages (from-to) | 1390-1394 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 20 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - Jul 2002 |
| Externally published | Yes |