Low temperature selective Si and Si-based alloy epitaxy for advanced transistor applications

Yihwan Kim*, Ali Zojaji, Zhiyuan Ye, Andrew Lam, Nicholas Dalida, Errol Sanchez, Satheesh Kuppurao

*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceedingConference Proceedingpeer-review

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Material Science