Investigation of the electrical performance of hfo2 dielectrics deposited on passivated germanium substrates

Q. Lu, Y. Mu, Y. Zhao, C. Z. Zhao*, S. Taylor, P. R. Chalker

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Fingerprint

Dive into the research topics of 'Investigation of the electrical performance of hfo2 dielectrics deposited on passivated germanium substrates'. Together they form a unique fingerprint.