In Situ Rutherford backscattering spectrometry analysis of films by combination with sputter etching

Lei Jiang*, Bo Liu, Zhu ying Zhou, Mian hong He, Guo qing Zhao, Xiang fu Zong

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

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Engineering

Material Science