Five-beam interference pattern model for laser interference lithography

Xiangying Deng*, Zhen Hu, Guowei Xiu, Zhengxun Song, Zhankun Weng, Jia Xu, Dayou Li, Yong Yue, Zuobin Wang

*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

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