Enhancement of piezoelectric micromachined ultrasonic transducer using polymer membrane for underwater applications

Mohd Ikhwan Hadi Yaacob; Mohd Rizal Arshad; Asrulnizam Abd Manaf; Mohamad Faizal Abd Rahman; Siti Sarah Samsuri

Enhancement of piezoelectric micromachined ultrasonic transducer using polymer membrane for underwater applications

Mohd Ikhwan Hadi Yaacob
, Mohd Rizal Arshad
, Asrulnizam Abd Manaf
, Mohamad Faizal Abd Rahman
, Siti Sarah Samsuri

Universiti Sains Malaysia

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

An effort to enhance receiving response of piezoelectric micromachined ultrasonic transducers (pMUT) at low frequency was reported. PMUTs were fabricated with the vibrating membrane formed by a layer of polydimethylsiloxane (PDMS) polymer. Lead zirconate titanate, Pd (Zt, Ti)O₃ (PZT) was utilized as the piezo-active layer, sputtered with nickel electrodes. Spin coating and low temperature wafer bonding were proposed as part of the key fabrication methods. Fabricated transducers were characterized in the compact acoustic tank setup using 500 kHz and 1. 25 MHz reference projectors. Analyses revealed the maximum receiving response was-36. 6 dB re 1V of 200 kHz burst at 10 λ hydrophone-projector separations and 20 V peak to peak of drive voltage on reference projector. Finally, response spectrum of the transducer was plotted against two commercialized bulk hydrophones at equivalent frequency band for validation and comparison.

Original language	English
Pages (from-to)	533-539
Number of pages	7
Journal	Indian Journal of Marine Sciences
Volume	41
Issue number	6
Publication status	Published - Feb 2012
Externally published	Yes

Keywords

Hydrophone
Piezoelectric
Receiving response
Resonance frequency

Cite this

@article{ef5b89f3a6704ec0b4a6c1278032899e,

title = "Enhancement of piezoelectric micromachined ultrasonic transducer using polymer membrane for underwater applications",

abstract = "An effort to enhance receiving response of piezoelectric micromachined ultrasonic transducers (pMUT) at low frequency was reported. PMUTs were fabricated with the vibrating membrane formed by a layer of polydimethylsiloxane (PDMS) polymer. Lead zirconate titanate, Pd (Zt, Ti)O3 (PZT) was utilized as the piezo-active layer, sputtered with nickel electrodes. Spin coating and low temperature wafer bonding were proposed as part of the key fabrication methods. Fabricated transducers were characterized in the compact acoustic tank setup using 500 kHz and 1. 25 MHz reference projectors. Analyses revealed the maximum receiving response was-36. 6 dB re 1V of 200 kHz burst at 10 λ hydrophone-projector separations and 20 V peak to peak of drive voltage on reference projector. Finally, response spectrum of the transducer was plotted against two commercialized bulk hydrophones at equivalent frequency band for validation and comparison.",

keywords = "Hydrophone, Piezoelectric, Receiving response, Resonance frequency",

author = "Yaacob, \{Mohd Ikhwan Hadi\} and Arshad, \{Mohd Rizal\} and Manaf, \{Asrulnizam Abd\} and Rahman, \{Mohamad Faizal Abd\} and Samsuri, \{Siti Sarah\}",

year = "2012",

month = feb,

language = "English",

volume = "41",

pages = "533--539",

journal = "Indian Journal of Marine Sciences",

issn = "0379-5136",

number = "6",

}

TY - JOUR

T1 - Enhancement of piezoelectric micromachined ultrasonic transducer using polymer membrane for underwater applications

AU - Yaacob, Mohd Ikhwan Hadi

AU - Arshad, Mohd Rizal

AU - Manaf, Asrulnizam Abd

AU - Rahman, Mohamad Faizal Abd

AU - Samsuri, Siti Sarah

PY - 2012/2

Y1 - 2012/2

N2 - An effort to enhance receiving response of piezoelectric micromachined ultrasonic transducers (pMUT) at low frequency was reported. PMUTs were fabricated with the vibrating membrane formed by a layer of polydimethylsiloxane (PDMS) polymer. Lead zirconate titanate, Pd (Zt, Ti)O3 (PZT) was utilized as the piezo-active layer, sputtered with nickel electrodes. Spin coating and low temperature wafer bonding were proposed as part of the key fabrication methods. Fabricated transducers were characterized in the compact acoustic tank setup using 500 kHz and 1. 25 MHz reference projectors. Analyses revealed the maximum receiving response was-36. 6 dB re 1V of 200 kHz burst at 10 λ hydrophone-projector separations and 20 V peak to peak of drive voltage on reference projector. Finally, response spectrum of the transducer was plotted against two commercialized bulk hydrophones at equivalent frequency band for validation and comparison.

AB - An effort to enhance receiving response of piezoelectric micromachined ultrasonic transducers (pMUT) at low frequency was reported. PMUTs were fabricated with the vibrating membrane formed by a layer of polydimethylsiloxane (PDMS) polymer. Lead zirconate titanate, Pd (Zt, Ti)O3 (PZT) was utilized as the piezo-active layer, sputtered with nickel electrodes. Spin coating and low temperature wafer bonding were proposed as part of the key fabrication methods. Fabricated transducers were characterized in the compact acoustic tank setup using 500 kHz and 1. 25 MHz reference projectors. Analyses revealed the maximum receiving response was-36. 6 dB re 1V of 200 kHz burst at 10 λ hydrophone-projector separations and 20 V peak to peak of drive voltage on reference projector. Finally, response spectrum of the transducer was plotted against two commercialized bulk hydrophones at equivalent frequency band for validation and comparison.

KW - Hydrophone

KW - Piezoelectric

KW - Receiving response

KW - Resonance frequency

UR - https://www.scopus.com/pages/publications/84870907799

M3 - Article

AN - SCOPUS:84870907799

SN - 0379-5136

VL - 41

SP - 533

EP - 539

JO - Indian Journal of Marine Sciences

JF - Indian Journal of Marine Sciences

IS - 6

ER -

Enhancement of piezoelectric micromachined ultrasonic transducer using polymer membrane for underwater applications

Abstract

Keywords

Other files and links

Fingerprint

Cite this