TY - JOUR
T1 - Enhancement of piezoelectric micromachined ultrasonic transducer using polymer membrane for underwater applications
AU - Yaacob, Mohd Ikhwan Hadi
AU - Arshad, Mohd Rizal
AU - Manaf, Asrulnizam Abd
AU - Rahman, Mohamad Faizal Abd
AU - Samsuri, Siti Sarah
PY - 2012/2
Y1 - 2012/2
N2 - An effort to enhance receiving response of piezoelectric micromachined ultrasonic transducers (pMUT) at low frequency was reported. PMUTs were fabricated with the vibrating membrane formed by a layer of polydimethylsiloxane (PDMS) polymer. Lead zirconate titanate, Pd (Zt, Ti)O3 (PZT) was utilized as the piezo-active layer, sputtered with nickel electrodes. Spin coating and low temperature wafer bonding were proposed as part of the key fabrication methods. Fabricated transducers were characterized in the compact acoustic tank setup using 500 kHz and 1. 25 MHz reference projectors. Analyses revealed the maximum receiving response was-36. 6 dB re 1V of 200 kHz burst at 10 λ hydrophone-projector separations and 20 V peak to peak of drive voltage on reference projector. Finally, response spectrum of the transducer was plotted against two commercialized bulk hydrophones at equivalent frequency band for validation and comparison.
AB - An effort to enhance receiving response of piezoelectric micromachined ultrasonic transducers (pMUT) at low frequency was reported. PMUTs were fabricated with the vibrating membrane formed by a layer of polydimethylsiloxane (PDMS) polymer. Lead zirconate titanate, Pd (Zt, Ti)O3 (PZT) was utilized as the piezo-active layer, sputtered with nickel electrodes. Spin coating and low temperature wafer bonding were proposed as part of the key fabrication methods. Fabricated transducers were characterized in the compact acoustic tank setup using 500 kHz and 1. 25 MHz reference projectors. Analyses revealed the maximum receiving response was-36. 6 dB re 1V of 200 kHz burst at 10 λ hydrophone-projector separations and 20 V peak to peak of drive voltage on reference projector. Finally, response spectrum of the transducer was plotted against two commercialized bulk hydrophones at equivalent frequency band for validation and comparison.
KW - Hydrophone
KW - Piezoelectric
KW - Receiving response
KW - Resonance frequency
UR - http://www.scopus.com/inward/record.url?scp=84870907799&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:84870907799
SN - 0379-5136
VL - 41
SP - 533
EP - 539
JO - Indian Journal of Marine Sciences
JF - Indian Journal of Marine Sciences
IS - 6
ER -