Effect of stress on activation during the formation of np junction in co-implanted germanium

Nur Nadhirah Rashid*, Umar Abdul Aziz, Siti Rahmah Aid, Suwa Akira, Hiroshi Ikenoue, Fang Xie, Anthony Centeno

*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceedingConference Proceedingpeer-review

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Engineering

Material Science