Determination of two-dimensional phase shifts in three-beam laser interference patterns

Yinbao Lei; Zuobin Wang; Jia Xu; Jinjin Zhang; Dapeng Wang; Yu Hou; Yong Yue; Dayou Li

doi:10.1109/3M-NANO.2012.6473001

Determination of two-dimensional phase shifts in three-beam laser interference patterns

Yinbao Lei^*
, Zuobin Wang
, Jia Xu
, Jinjin Zhang
, Dapeng Wang
, Yu Hou
, Yong Yue
, Dayou Li

^*Corresponding author for this work

Changchun University of Science and Technology
University of Bedfordshire

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

2 Citations (Scopus)

Abstract

This paper describes a method of determining two-dimensional phase shifts. In this method, the two-dimensional phase shift is divided into horizontal and vertical components, and each component of the phase shift is determined by pattern correlation, Pythagorean theorem and linear interpolation with subpixel accuracy. The computer simulation and experiment have shown that the method is useful for the determination of phase difference between two three-beam interference patterns. The method can also be used to determine the phase shift in other multi-beam interference patterns.

Original language	English
Title of host publication	2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings
Pages	9-13
Number of pages	5
DOIs	https://doi.org/10.1109/3M-NANO.2012.6473001
Publication status	Published - 2012
Externally published	Yes
Event	2012 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Xi'an, China Duration: 29 Aug 2012 → 1 Sept 2012

Publication series

Name	2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings

Conference

Conference	2012 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012
Country/Territory	China
City	Xi'an
Period	29/08/12 → 1/09/12

Keywords

Laser interference lithography
correlation coefficient
two-dimensional phase shift

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10.1109/3M-NANO.2012.6473001

Cite this

Lei, Y., Wang, Z., Xu, J., Zhang, J., Wang, D., Hou, Y., Yue, Y., & Li, D. (2012). Determination of two-dimensional phase shifts in three-beam laser interference patterns. In 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings (pp. 9-13). Article 6473001 (2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings). https://doi.org/10.1109/3M-NANO.2012.6473001

Lei, Yinbao ; Wang, Zuobin ; Xu, Jia et al. / Determination of two-dimensional phase shifts in three-beam laser interference patterns. 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings. 2012. pp. 9-13 (2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings).

@inproceedings{f6b1a466e4584d8f98b764f87249cfed,

title = "Determination of two-dimensional phase shifts in three-beam laser interference patterns",

abstract = "This paper describes a method of determining two-dimensional phase shifts. In this method, the two-dimensional phase shift is divided into horizontal and vertical components, and each component of the phase shift is determined by pattern correlation, Pythagorean theorem and linear interpolation with subpixel accuracy. The computer simulation and experiment have shown that the method is useful for the determination of phase difference between two three-beam interference patterns. The method can also be used to determine the phase shift in other multi-beam interference patterns.",

keywords = "Laser interference lithography, correlation coefficient, two-dimensional phase shift",

author = "Yinbao Lei and Zuobin Wang and Jia Xu and Jinjin Zhang and Dapeng Wang and Yu Hou and Yong Yue and Dayou Li",

year = "2012",

doi = "10.1109/3M-NANO.2012.6473001",

language = "English",

isbn = "9781467345897",

series = "2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings",

pages = "9--13",

booktitle = "2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings",

note = "2012 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 ; Conference date: 29-08-2012 Through 01-09-2012",

}

Lei, Y, Wang, Z, Xu, J, Zhang, J, Wang, D, Hou, Y, Yue, Y & Li, D 2012, Determination of two-dimensional phase shifts in three-beam laser interference patterns. in 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings., 6473001, 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings, pp. 9-13, 2012 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, Xi'an, China, 29/08/12. https://doi.org/10.1109/3M-NANO.2012.6473001

Determination of two-dimensional phase shifts in three-beam laser interference patterns. / Lei, Yinbao; Wang, Zuobin; Xu, Jia et al.
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings. 2012. p. 9-13 6473001 (2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings).

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

TY - GEN

T1 - Determination of two-dimensional phase shifts in three-beam laser interference patterns

AU - Lei, Yinbao

AU - Wang, Zuobin

AU - Xu, Jia

AU - Zhang, Jinjin

AU - Wang, Dapeng

AU - Hou, Yu

AU - Yue, Yong

AU - Li, Dayou

PY - 2012

Y1 - 2012

N2 - This paper describes a method of determining two-dimensional phase shifts. In this method, the two-dimensional phase shift is divided into horizontal and vertical components, and each component of the phase shift is determined by pattern correlation, Pythagorean theorem and linear interpolation with subpixel accuracy. The computer simulation and experiment have shown that the method is useful for the determination of phase difference between two three-beam interference patterns. The method can also be used to determine the phase shift in other multi-beam interference patterns.

AB - This paper describes a method of determining two-dimensional phase shifts. In this method, the two-dimensional phase shift is divided into horizontal and vertical components, and each component of the phase shift is determined by pattern correlation, Pythagorean theorem and linear interpolation with subpixel accuracy. The computer simulation and experiment have shown that the method is useful for the determination of phase difference between two three-beam interference patterns. The method can also be used to determine the phase shift in other multi-beam interference patterns.

KW - Laser interference lithography

KW - correlation coefficient

KW - two-dimensional phase shift

UR - https://www.scopus.com/pages/publications/84875667845

U2 - 10.1109/3M-NANO.2012.6473001

DO - 10.1109/3M-NANO.2012.6473001

M3 - Conference Proceeding

AN - SCOPUS:84875667845

SN - 9781467345897

T3 - 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings

SP - 9

EP - 13

BT - 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings

T2 - 2012 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012

Y2 - 29 August 2012 through 1 September 2012

ER -

Lei Y, Wang Z, Xu J, Zhang J, Wang D, Hou Y et al. Determination of two-dimensional phase shifts in three-beam laser interference patterns. In 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings. 2012. p. 9-13. 6473001. (2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings). doi: 10.1109/3M-NANO.2012.6473001

Determination of two-dimensional phase shifts in three-beam laser interference patterns

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Keywords

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