Correction: Deep learning in optical metrology: a review (Light: Science & Applications, (2022), 11, 1, (39), 10.1038/s41377-022-00714-x)

Chao Zuo; Jiaming Qian; Shijie Feng; Wei Yin; Yixuan Li; Pengfei Fan; Jing Han; Kemao Qian; Qian Chen

doi:10.1038/s41377-022-00757-0

Correction: Deep learning in optical metrology: a review (Light: Science & Applications, (2022), 11, 1, (39), 10.1038/s41377-022-00714-x)

Chao Zuo^*
, Jiaming Qian
, Shijie Feng
, Wei Yin
, Yixuan Li
, Pengfei Fan
, Jing Han
, Kemao Qian^*
, Qian Chen^*

^*Corresponding author for this work

Research output: Contribution to journal › Comment/debate

5 Citations (Scopus)

Abstract

Following publication of this article1, it is noticed that some brackets are missing in the mathematical expressions in Fig. 1. Updated Fig. 1 is provided in this Correction.

Original language	English
Article number	74
Journal	Light: Science and Applications
Volume	11
Issue number	1
DOIs	https://doi.org/10.1038/s41377-022-00757-0
Publication status	Published - Dec 2022
Externally published	Yes

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10.1038/s41377-022-00757-0

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@article{aaabd6d9d3d04bb7ab8b44afd72cebab,

title = "Correction: Deep learning in optical metrology: a review (Light: Science \& Applications, (2022), 11, 1, (39), 10.1038/s41377-022-00714-x)",

abstract = "Following publication of this article1, it is noticed that some brackets are missing in the mathematical expressions in Fig. 1. Updated Fig. 1 is provided in this Correction.",

author = "Chao Zuo and Jiaming Qian and Shijie Feng and Wei Yin and Yixuan Li and Pengfei Fan and Jing Han and Kemao Qian and Qian Chen",

note = "Publisher Copyright: {\textcopyright} The Author(s) 2022.",

year = "2022",

month = dec,

doi = "10.1038/s41377-022-00757-0",

language = "English",

volume = "11",

journal = "Light: Science and Applications",

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TY - JOUR

T1 - Correction

T2 - Deep learning in optical metrology: a review (Light: Science & Applications, (2022), 11, 1, (39), 10.1038/s41377-022-00714-x)

AU - Zuo, Chao

AU - Qian, Jiaming

AU - Feng, Shijie

AU - Yin, Wei

AU - Li, Yixuan

AU - Fan, Pengfei

AU - Han, Jing

AU - Qian, Kemao

AU - Chen, Qian

PY - 2022/12

Y1 - 2022/12

N2 - Following publication of this article1, it is noticed that some brackets are missing in the mathematical expressions in Fig. 1. Updated Fig. 1 is provided in this Correction.

AB - Following publication of this article1, it is noticed that some brackets are missing in the mathematical expressions in Fig. 1. Updated Fig. 1 is provided in this Correction.

UR - https://www.scopus.com/pages/publications/85127408458

U2 - 10.1038/s41377-022-00757-0

DO - 10.1038/s41377-022-00757-0

M3 - Comment/debate

AN - SCOPUS:85127408458

SN - 2095-5545

VL - 11

JO - Light: Science and Applications

JF - Light: Science and Applications

IS - 1

M1 - 74

ER -

Correction: Deep learning in optical metrology: a review (Light: Science & Applications, (2022), 11, 1, (39), 10.1038/s41377-022-00714-x)

Abstract

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