Atomic-scale simulations of early stage of oxidation of vicinal Si(001) surfaces using a reactive force-field potentials

Kyung Han Yun*, Yubin Hwang, Heechae Choi, Eung Kwan Lee, Geunsup Yoon, Byung Hyun Kim, Yong Chae Chung

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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