An Electromagnetic Study of Scalability of CMOS-compatible Si3N4 Optical Waveguides for Nanophotonics on a Silicon Substrate

^*Corresponding author for this work

Research output: Contribution to conference › Paper › peer-review

Original language	English
Publication status	Accepted/In press - 6 Jan 2025
Event	2025 10th IEEE International Nanoelectronics Conference - Tamsui, Taipei, Taiwan, Province of China Duration: 3 Jan 2025 → 6 Jan 2025 https://ieeeinec.org/

Conference	2025 10th IEEE International Nanoelectronics Conference
Abbreviated title	INEC 2025
Country/Territory	Taiwan, Province of China
City	Taipei
Period	3/01/25 → 6/01/25
Internet address	https://ieeeinec.org/

Cite this

@conference{e7ecf764b9984e2e8594e06d28d95f06,

title = "An Electromagnetic Study of Scalability of CMOS-compatible Si3N4 Optical Waveguides for Nanophotonics on a Silicon Substrate",

author = "Wenli Zhou and Rui Yao and Sang Lam",

year = "2025",

month = jan,

day = "6",

language = "English",

note = "2025 10th IEEE International Nanoelectronics Conference, INEC 2025 ; Conference date: 03-01-2025 Through 06-01-2025",

url = "https://ieeeinec.org/",

}