A golden-block-based self-refining scheme for repetitive patterned wafer inspections

Sheng Uei Guan*, Pin Xie, Hong Li

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Fingerprint

Dive into the research topics of 'A golden-block-based self-refining scheme for repetitive patterned wafer inspections'. Together they form a unique fingerprint.