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一种鳍式场效应晶体管及其制备方法

Translated title of the contribution: a fin-type field-effect transistor and a preparation method thereof
  • Fan Li (Inventor)
  • , Wen Liu (Inventor)
  • , Ang Li (Inventor)
  • , Weisheng Wang (Inventor)
  • , Yifei Yin (Inventor)
  • Xi'an Jiaotong-Liverpool University

Research output: Patent

Translated title of the contributiona fin-type field-effect transistor and a preparation method thereof
Original languageChinese (Simplified)
Patent granted numberCN116666436B
Validity date24/07/43
Publication statusPublished - 17 Oct 2023

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