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一种法向二自由度微动平台

Translated title of the contribution: Normal two-degree-of-freedom micro-motion platform
  • Min Chen (Inventor)
  • , Yiru Wang (Inventor)
  • , Shunqi Zhang (Inventor)
  • , Bin Wu (Inventor)
  • , Lin Zhu (Inventor)

Research output: Patent

Translated title of the contributionNormal two-degree-of-freedom micro-motion platform
Original languageChinese (Simplified)
Patent granted numberCN209425432U
Validity date25/12/28
Publication statusPublished - 24 Sept 2019

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