一种基于纳米簇绝缘层的高性能薄膜晶体管及制备方法

Translated title of the contribution: High-performance thin film transistor based on nano-cluster insulating layer and preparation method thereof
  • Tianshi Zhao (Inventor)
  • , Chun Zhao (Inventor)
  • , Cezhou Zhao (Inventor)
  • , Li Yang (Inventor)

Research output: Patent

Translated title of the contributionHigh-performance thin film transistor based on nano-cluster insulating layer and preparation method thereof
Original languageChinese (Simplified)
Patent granted numberCN110061061B
Validity date12/04/39
Publication statusPublished - 13 Sept 2024

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