| Translated title of the contribution | Semiconductor device and production method thereof |
|---|---|
| Original language | Chinese (Simplified) |
| Patent granted number | CN113594044B |
| Validity date | 27/07/41 |
| Publication status | Published - 1 Oct 2024 |
一种半导体器件及其制备方法
Ye Liang (Inventor), Yuanlei Zhang (Inventor), Wen Liu (Inventor), Cezhou Zhao (Inventor)
Research output: Patent